Lam Research

Lam Research (Lam Research Corporation) demonstrates outstanding strength in the field of industrial automation, relying on its profound technological accumulation. In the production process, the automated warehouse put into operation at the Penang manufacturing center in Malaysia in 2021 has achieved seamless integration between logistics and production by means of advanced technologies such as the Automated Storage and Retrieval System (ASRS), Autonomous Mobile Robots (AMRs), and Automated Guided Vehicles (AGVs), improving the efficiency of warehouse management and reducing costs. In terms of equipment maintenance, it has launched Dextro, the world's first collaborative robot designed specifically for the maintenance of semiconductor manufacturing equipment. With sub-micron precision, it can work in tandem with engineers in the wafer fab to perform complex maintenance tasks, reducing equipment downtime. At the same time, the Lam Equipment Intelligence process tool utilizes data and intelligent technologies to achieve efficient maintenance management. In semiconductor processes, its subsidiary Coventor, as a market leader in developing semiconductor process technologies and automation solutions for Micro-Electro-Mechanical Systems (MEMS), has the SEMulator3D modeling and analysis platform. Through "virtual manufacturing", it helps engineers grasp the manufacturing effects in advance, shortening the process development cycle and comprehensively promoting the automation process and industrial upgrading of semiconductor manufacturing.