The Zygo ZMI-501 measurement board is specifically designed to meet the demands of stringent position metrology applications. It utilizes the optical signals generated by an interferometer driven by a ZMI laser source to accurately calculate displacement, providing a solid guarantee for various high-precision measurement tasks.
Core Features
Dual-axis Measurement Integration: The ZMI-501 measurement board implements two-axis measurement functionality in a convenient standalone enclosure, significantly saving space while meeting multi-dimensional measurement needs. In practical applications, such as displacement monitoring of wafer stages in semiconductor manufacturing, it can simultaneously perform precise measurements of displacements in both X and Y directions, avoiding the time loss and possible error accumulation caused by measuring different axes separately.
Sub-nanometer Resolution: It has the capability to provide sub-nanometer resolution, enabling it to easily handle position metrology applications with extremely high precision requirements, such as micro-displacement monitoring during the grinding of high-end optical lenses. This ensures that the accuracy of measurement results reaches the top level in the industry.
Patented Error Correction: It features a patented cyclic error correction option, which can automatically and seamlessly eliminate nonlinear errors common in DMI systems. Taking positioning measurement in precision machining as an example, the correction function can optimize measurement data in real-time, ensuring the final measurement accuracy and avoiding product quality issues caused by errors.
Multi-channel and Fast Interface Support: It supports up to 4 measurement channels and can easily interface with standard motion control systems at a fast data rate. In the motion control segment of automated production lines, the fast data transmission and multi-channel parallel processing capabilities can efficiently coordinate the operation of various moving components, improving overall production efficiency.
Application Fields
Semiconductor Manufacturing Field: The Zygo ZMI-501 measurement board plays a key role in equipment such as wafer stages, reticle stages, and stacking stage systems in advanced packaging processes. For example, during the wafer lithography process, it can accurately measure the tiny displacements of the wafer stage, ensuring the precise transfer of lithography patterns and improving the yield rate of chip manufacturing.
Precision Machining Field: For large-scale precision machining equipment such as gantry systems, this measurement board can monitor the position changes of machined components in real-time, providing data support for precision control during the machining process and ensuring that the machining accuracy of mechanical parts meets strict design requirements.
Optical System Field: In the position adjustment and control of optical components such as steering mirrors, the Zygo ZMI-501 measurement board can provide high-precision position feedback, helping to achieve precise alignment and stable operation of optical systems, and improving performance indicators such as optical imaging quality.
With its excellent performance and wide applicability, the Zygo ZMI-501 measurement board has become an important choice for many industries with high-precision measurement needs, contributing to promoting technological progress and improving product quality in related fields.
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