ZYGO ZMI 501A 8020-0237-05 is a complete and compact measurement electronics solution specifically designed for displacement measurement interferometers. It utilizes the optical signals from an interferometer driven by a ZMI laser source to calculate displacement, and can provide high-precision measurements for demanding position metrology applications.
Functional Features
Multi-axis Measurement Capability: It can provide two-axis measurement in a convenient standalone enclosure to meet multi-dimensional measurement needs. For more axes requirements, it can achieve measurement expansion up to 64 axes by modularly adding ZMI 2400, 4000 and 4100 series boards in a VME chassis, featuring excellent scalability.
High-precision Measurement: It can offer sub-nanometer resolution for highly challenging position metrology applications, making it suitable for work scenarios with extremely high precision requirements. Moreover, its patented cyclic error correction option can automatically and seamlessly eliminate nonlinear errors common in DMI systems, ensuring the ultimate measurement accuracy.
Fast Data Interface: It supports up to 4 measurement channels and can easily interface with standard motion control systems at a fast data rate, ensuring efficient data transmission and improving overall work efficiency.
DATA SHEET
Technical Parameters
| Item | Details |
|---|---|
| Physical Characteristics | Weight: 2 pounds (1 kg); Cable clearance at both ends: 5 inches (127 mm) |
| Electrical Requirements | Nominal power supply requirement: +5.2 VDC, current: 3.3 A |
| Environmental Conditions | Operating temperature range: 0 to 40°C, non-condensing conditions |
| Measurement Board | Each board can handle 2 axes; Minimum optical input power: 8 µW; Linear accuracy at 3 V: 1.3 LSB |
| Serial (Quadrature) Data | Maximum position resolution: 1/512 (1.24 nm); Position range: ±10.6 m; Maximum target mirror speed: 475 mm/s; Data rate: optional 3 to 24 MHz |
| Parallel Data | Constant position resolution: 1/512 (1.24 nm); Position range: ±10.6 m; Maximum target mirror speed: 475 mm/s |
Application Fields
It is particularly suitable for semiconductor metrology and advanced packaging applications, and performs excellently in scenarios requiring high precision and stability, such as:
Suggestions for Matching Use
This measurement electronic device can be integrated with ZMI lasers (such as ZMI 7705), which can further improve the performance in precision metrology applications and provide users with better measurement solutions.
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