001‑4130‑03 (also known as the VCE Controller) is a wafer‑alignment controller specially designed for Brooks Automation semiconductor equipment. It is mainly integrated into semiconductor wafer‑processing equipment. It receives image signals from CCD vision cameras, performs notch / flat‑edge recognition for silicon wafers, and outputs motion‑control commands to drive actuators for high‑precision X/Y/θ (rotational) alignment and positioning of wafers. Widely applied in wafer handling and pre‑alignment stations, it is a spare part for legacy‑generation semiconductor equipment and has been discontinued by the original manufacturer.
Hardware Interfaces
- CCD SINGLE: Single‑channel CCD camera interface
- CCD DUAL: Dual‑channel CCD camera interface, supporting dual‑camera vision acquisition for wafer edge and notch inspection
- LED: Camera light‑source control output
- TX/RX: Serial transmit‑receive interface
- COM1, COM2: DB9 serial ports (RS‑232), for host‑computer debugging, parameter configuration and device interaction
Core Functions
- Vision image acquisition & processing: Receives single / dual‑channel CCD camera signals to identify positions of wafer flat edges and locating notches.
- Multi‑axis motion control: Outputs control signals to drive servo mechanisms, performing wafer X/Y displacement and θ rotation correction to realize pre‑alignment and positioning.
- Serial‑port communication: Communicates with the equipment host via COM ports, uploading alignment status and fault information, and downloading alignment parameters.
Application Scenarios
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