AGILENT 5517C Laser Head

The Agilent 5517C Laser Head is a laser head launched by Keysight (formerly Agilent), mainly used in VME and PC-based laser interferometer systems, and is suitable for application scenarios with fast-moving speeds such as semiconductor lithography and flat panels.

• Laser Type: Helium-Neon (HeNe) laser.
• Wavelength: Approximately 633nm, with a more precise value of 632.991354nm.
• Minimum Output Power: 180µW as standard; different options have different minimum values, such as Option H03 being 300µW, Option H05 being 240µW, and Option H07 being 400µW.
• Maximum Output Power: 1mW.
• Beam Diameter: 6mm as standard; 3mm for Option 003; 9mm for Option 009.
• Beam Height: 79.5±1.0mm.
• Reference Frequency: 2.4 to 3.0MHz.

• Maximum Linear Optical Speed: 711mm/s.

• Weight: 3.4kg (7.5lb).
• Dimensions: Approximately 127mm × 102mm × 152mm (height × width × depth).
• Warm-up Time: Usually 90 minutes, but some data indicate it is less than 1 hour.

• +15V±0.3V, maximum 3.0A.
• -15V±0.3V, maximum 0.3A.

• Power Output Stability: ±0.02%.
• Beam Divergence (Full Angle): <0.9mrad.
• Polarization: Linear, with a vertical-to-horizontal ratio >500:1.
• Coherence Length: >15m.

• Operating Temperature: 15℃ to 40℃.

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