The AMAT (Applied Materials) 0010-13626 HEATER ASSY is an 8-inch biased heater assembly specially designed for semiconductor physical vapor deposition (PVD) equipment. As a member of AMAT's B101 series of heaters, it is mainly compatible with PVD mainframe equipment and undertakes the core tasks of wafer heating and temperature control in key processes such as semiconductor thin film deposition. It can provide a stable and uniform temperature environment for the process, ensuring the precision and consistency of processes like wafer coating. It is widely used in the maintenance and upgrading of PVD equipment in semiconductor factories.

Core Functions and Applicable Scenarios

Precise Temperature Control for Process Compatibility

As a biased heater assembly, it can precisely adjust heating power and temperature output to meet the stringent wafer temperature requirements in semiconductor PVD processes. A stable temperature environment prevents issues such as uneven film thickness and insufficient adhesion caused by temperature fluctuations, thus ensuring the quality of wafer processing.

Exclusive Compatibility with PVD Equipment

It is specially matched to AMAT’s 8-inch PVD equipment and serves as a dedicated spare part for such devices. Its interfaces and installation dimensions fully comply with the original factory standards of AMAT PVD mainframes, enabling direct compatible connection with the equipment without additional modifications, which facilitates quick equipment maintenance and component replacement.

Reliable Adaptation to Industrial Environments

Featuring an industrial-grade durable design, it can adapt to the special production environment of high temperature and high cleanliness in semiconductor factories. Refurbished versions are also inspected and calibrated in accordance with original factory specifications, ensuring that their performance parameters meet equipment operation requirements and that they possess stability and service life comparable to those of original parts.

Technical Parameters

• Product Specifications

• It is suitable for 8-inch wafers, with the model designated as ASSY BIASABLE 101 HEATER and the version number REV LC01.

• Resistance Reading

• The standard resistance value is 14.8 ohms, which is a key indicator for measuring the electrothermal conversion performance of the heater.

• Product Weight

• Weighing 11 kilograms, its heavy-duty body design can enhance stability during operation and meet the installation requirements of industrial equipment.

• Product CategoryIt

• is classified as an accessory related to the 5500 PVD mainframe, and is clearly matched to the corresponding PVD equipment series under AMAT.

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