Lam Research 660-243522-123 Power Supply Module
Overview
The Lam Research 660-243522-123 is a high-performance 12kW dual-output heater power supply module designed for semiconductor manufacturing equipment. Manufactured by XP Power under the model number 102365-02-VN, this power supply delivers precise and reliable DC power for electrostatic chuck (ESC) heater systems in Lam Research etch platforms.
The 660-243522-123 power supply module features dual isolated DC outputs — 175VDC and 120VDC — providing independent power channels for multi-zone heater control. Built with industrial-grade components and active fan cooling, the 660-243522-123 ensures continuous operation in demanding fab environments.
Technical Specifications
| Parameter | Specification |
|---|---|
| OEM Part Number | 660-243522-123 |
| Manufacturer | Lam Research (OEM: XP Power) |
| XP Power Model | 102365-02-VN |
| Product Type | Heater Power Supply (AC-DC) |
| Input Voltage | 208 VAC |
| Output 1 | 175 VDC |
| Output 2 | 120 VDC |
| Total Power | 12 kW |
| Output Configuration | Dual Output (Dual OUT) |
| Cooling Method | Active Fan Cooling (Triple Fan) |
| Status Indicators | 175VDC Enabled LED, 120VDC Enabled LED |
| Mounting | Rack Mount / Chassis Mount |
| Application | Semiconductor Etch Equipment |
| Condition Options | New / Refurbished / Used (Tested) |
Key Features & Benefits
- Dual Independent Outputs — 175VDC and 120VDC channels support multi-zone ESC heater control for precise temperature regulation
- 12kW High Power Density — Delivers sufficient power for advanced etch process heater systems in a compact form factor
- Triple Fan Active Cooling — Three high-performance fans ensure optimal thermal management during continuous 24/7 operation
- Industrial-Grade Reliability — Built with premium components to meet the stringent uptime requirements of semiconductor fabs
- Real-Time Status Monitoring — Front-panel LED indicators for 175VDC and 120VDC output status enable quick diagnostics
- OEM-Quality Performance — Manufactured by XP Power, fully compatible with Lam Research 660-243522-123 specifications
Hot-Swap Friendly Design — Front handles and rack-mount form factor facilitate quick replacement minimizing downtime
Compatible Equipment
The Lam Research 660-243522-123 power supply module is designed for use in Lam Research plasma etch systems, primarily powering electrostatic chuck (ESC) heater assemblies.
- Lam Research 2300 Kiyo Series Etchers
- Lam Research 2300 Versys Kiyo Platforms
- Lam Research Flex Series Dielectric Etch Systems
- ESC (Electrostatic Chuck) Heater Power Systems
Multi-Zone Temperature Control Subsystems
Applications
- Semiconductor wafer etching processes
- Electrostatic chuck (ESC) heater power delivery
- Multi-zone wafer temperature control
- Plasma etch chamber thermal management
- Conductor etch and dielectric etch applications
- Advanced memory and logic device manufacturing
Frequently Asked Questions
What is the Lam Research 660-243522-123?
The 660-243522-123 is a 12kW dual-output heater power supply module used in Lam Research semiconductor etch equipment. It provides 175VDC and 120VDC outputs to power electrostatic chuck (ESC) heater systems.
Who manufactures the 660-243522-123 power supply?
The 660-243522-123 is an OEM part from Lam Research, manufactured by XP Power under the model number 102365-02-VN. Both part numbers refer to the same power supply unit.
What are the output voltages of the 660-243522-123?
The Lam Research 660-243522-123 provides two independent DC output channels: 175VDC and 120VDC, with a combined total power rating of 12kW.
Which Lam Research tools use the 660-243522-123?
The 660-243522-123 power supply is primarily used in Lam Research 2300 Kiyo series etchers and 2300 Versys Kiyo platforms for ESC heater power delivery.
Is the 660-243522-123 the same as XP Power 102365-02-VN?
Yes, the XP Power 102365-02-VN is the OEM manufacturer's part number for the Lam Research 660-243522-123. They are the same physical power supply unit with different part number designations.
Note: Always verify part number compatibility with your specific equipment configuration before installation. Professional installation by qualified semiconductor maintenance personnel is recommended.
Related Tags
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